重型机械Issue(6)：42-45,4.
固结磨料研磨CVD金刚石膜的运动轨迹仿真及试验研究
Motion simulation and experimental research of lapping CVD diamond film with fixed abrasive
摘要
Abstract
With the expanding of the application scope of CVD diamond film,it has transformed from the traditional fields of cutting tool to high frequency communications,optoelectronics,microelectronics industry,etc.In this paper,firstly,motion model is established between pads and artifacts by theoretical analysis and the trajectory equation of workpiece is determined,and then movement simulation of polishing experiment has been carried out by using Matlab.Finally,electroplated diamond was carried out for polishing experiment,and optical microscope and Talysurf are used respectively for measuring surface morphology and surface roughness.关键词
CVD金刚石膜/运动仿真/电镀金刚石盘/抛光Key words
CVD diamond film/motion simulation/electroplated diamond plate/polishing分类
矿业与冶金引用本文复制引用
罗和平,刘永吉,何艳,汲军,苑泽伟..固结磨料研磨CVD金刚石膜的运动轨迹仿真及试验研究[J].重型机械,2017,(6):42-45,4.基金项目
“高档数控机床与基础制造装备”科技重大专项(No.2013ZX04001-031) （No.2013ZX04001-031）
