测控技术2017，Vol.36Issue(12)：106-109,4.
基于差动电容传感器的微动定位系统设计
Design of Micro-Drive Positioning System Based on Differential Capacitance Sensor
摘要
Abstract
A simple and compact micro-drive positioning system is designed and manufactured,and the system is of high precision,wide scanning scope and low cost.The mechanical structure of the system is designed with spring structure,and driven by piezoelectric ceramics,and the differential capacitance sensor is taken as displacemen feedback to achieve closed loop control,which effectively compensates the hysteresis and creep of piezoelectric ceramic actuator.The structure of the system and the working principle of the detection circuit are introduced,and the test and calibration for the system are carried out.The experiment results indicate that the micro-drive positioning system can achieve a scanning scope of 15 μm with a resolution of about 15 nm,and the dynamic performance is fine.关键词
差动电容传感器/压电陶瓷/纳米定位Key words
differential capacitance sensor/piezoelectric ceramics/nanometer positioning分类
机械制造引用本文复制引用
范贤光,阙靖,王昕,许英杰,吴腾达,陈军..基于差动电容传感器的微动定位系统设计[J].测控技术,2017,36(12):106-109,4.基金项目
福建省高端装备制造协同创新中心资金资助项目 （）
国家自然科学基金项目(21503171) （21503171）
中央高校基本科研业务费项目(20720150091,20720150094) （20720150091,20720150094）
