机械科学与技术2017，Vol.36Issue(12)：1921-1925,5.DOI:10.13433/j.cnki.1003-8728.2017.1219
氮化镓MOCVD感应加热装置的优化设计
Optimization Design of GaN-MOCVD Induction Heating Device
摘要
Abstract
Purpose of this paper is to design a low cost,high efficiency medium frequency induction heater.The 2D model of the vertical GaN-MOCVD reactor with induction heating was performed by the finite element method.The structural analysis of the copper coils on temperature uniformity on the surface of graphite was researched;then thermal-electromagnetic coupling analysis reveals that lessening the change can increase efficiency of heat conduction.The structural design of the induction heater is optimized based on the analysis results,and the prototype of heater is designed and fabricated.Finally,it verifies temperature distribution on the surface of graphite floating in 0.2％ by experiments and the uniform temperature distribution is good,meeting the production requirement.关键词
感应加热/MOCVD/ANSYS/热-电耦合/优化设计Key words
heat conduction/finite element method/temperature distribution/optimization/experiments/model/structural analysis/structural design分类
信息技术与安全科学引用本文复制引用
徐龙权,刘新卫,唐子涵,方颂..氮化镓MOCVD感应加热装置的优化设计[J].机械科学与技术,2017,36(12):1921-1925,5.基金项目
国家863计划项目(2012AA041002)与江西省科技厅重大科技专项(20114ABF06102)资助 （2012AA041002）
