表面技术2018，Vol.47Issue(1)：203-210,8.DOI:10.16490/j.cnki.issn.1001-3660.2018.01.032
预处理对金刚石薄膜质量及结合力的影响
Effects of Pretreatment on Quality and Adhesion of Diamond Films on Cemented Carbides
摘要
Abstract
The work aims to improve adhesion of diamond films on cemented carbides. The diamond films were deposited on cemented carbide substrates in the method of hot filament CVD. The effects of four pretreatment methods, i.e., sandblasting plus one-step etching, sandblasting plus two-steps etching, AlCrN transition layer and traditional two-steps etching method, on quality and adhesion properties of the diamond films were investigated. Morphology and roughness of the pretreated cemented carbide substrates were analyzed. Morphology, structure and properties of the diamond films were characterized with field emis-sion scanning electron microscopy (FESEM), X-ray diffractometer (XRD), Raman spectroscopy and Rockwell hardness tester. Sandblasting was beneficial to uniformly distributed dimples on the substrates, and nucleation density and uniformity of di-amond, and especially agglomeration of diamond particles. Although the surface roughness of AlCrN transition layer was not high, a large number of convex particles provided excellent nucleation sites. Nucleation density of diamond treated in this way was superior to that treated in traditional two-steps method to some extent. Provided with the same deposition parameters of diamond films, the adhesion of diamond films pretreated in the methods of two-steps etching, sandblasting plus one-step etching and sandblasting plus two-steps etching was class HF4, HF3 and HF1, respectively, while the adhesion of AlCrN transition layer was poor. AlCrN transition layer can prevent outward diffusion of Co and improve purity of diamond, but the diamond films ex-hibit high internal stress and poor adhesion. The combined pretreatment of sandblasting and etching not only improve crystalline quality and purity of diamond, but also enhance adhesion of diamond films.关键词
金刚石薄膜/热丝CVD/预处理/结合力/喷砂/硬质合金Key words
diamond film/hot filament CVD/pretreatment/adhesion/sandblasting/cemented carbide分类
矿业与冶金引用本文复制引用
熊超,李烈军,苏东艺,彭继华..预处理对金刚石薄膜质量及结合力的影响[J].表面技术,2018,47(1):203-210,8.基金项目
广东省省级科技计划项目(2015B090923006) （2015B090923006）
广州市科技计划项目(201604010020,2017010160670)Supported by the Guangdong Provincial Science and Technology Plan Project (2015B090923006) and the Guangzhou Science and Technology Plan Project (201604010020, 2017010160670) （201604010020,2017010160670）
