表面技术2018，Vol.47Issue(1)：254-259,6.DOI:10.16490/j.cnki.issn.1001-3660.2018.01.040
原子力显微镜和白光干涉仪在表面材料测试中的应用研究
Application of Atomic Force Microscope and White Light Interferometer in Surface Material Tests
郭志峰 1郭昭华 1王永旺 1陈东 1张云峰1
作者信息
- 1. 神华准能资源综合开发有限公司研发中心,内蒙古 鄂尔多斯 010300
- 折叠
摘要
Abstract
The work aims to test resolution of atomic force microscope and white light interferometer in surface material tests, and corresponding applicability to tests of various surface materials. Several surface materials of different thickness, in-cluding ZnO film, graphene and wear scar, were tested with the atomic force microscope and white light interferometer. ZnO film thickness above 100 nm could be measured accurately with 10× and 50× white light interferometers as well as atomic force microscope, measured film thickness was 148.668 nm, 123.354 nm and 111.648 nm, respectively; ZnO film thickness above 10 nm could be measured accurately with atomic force microscope, measured film thickness was 6.152 nm, but white light interfe-rometer could not measure the thickness. 3D data such as size, thickness, and number of layers of graphene sheet could be measured accurately with atomic force microscope, measured thickness was nearly 0.665 nm, number of layers of graphene was 1~2, but white light interferometer had not such high resolution; 3D data such as width and depth of wear scar could be meas-ured accurately with white light interferometer, the depth of wear scar was 4.245 μm, but atomic force microscope could not be used to test such rough surfaces. Atomic force microscope is suitable for testing 3D morphology and data of relatively smooth surface materials, such as film thickness above 10nm, thickness and number of layers of graphene sheets; white light interfero-meter is suitable for testing 3D morphology and data of relatively smooth surface materials, such as film thickness above 100 nm and depth of wear track above 1 μm.关键词
白光干涉仪/原子力显微镜/表面材料/测试Key words
white light interferometer/atomic force microscope/surface materials/test分类
矿业与冶金引用本文复制引用
郭志峰,郭昭华,王永旺,陈东,张云峰..原子力显微镜和白光干涉仪在表面材料测试中的应用研究[J].表面技术,2018,47(1):254-259,6.
