人工晶体学报2017，Vol.46Issue(12)：2393-2398,2416,7.
非水解溶胶-凝胶法制备硅酸锆薄膜及抗碱腐蚀性能
Preparation of Zirconium Silicate Film by Non-Hydrolytic Sol-Gel Method and Its Alkali Corrosion Resistance
摘要
Abstract
Zirconium silicate ( ZrSiO4 ) film was prepared via non-hydrolytic sol-gel method ( NHSG ) combining dip coating process using Zirconium propoxide as zirconium source and tetraethyl orthosilicate as silicon source .The effects of precursor concentration and lifting rate on the morphology , microstructure and alkali corrosion resistance of ZrSiO 4 film were investigated by X-ray diffraction ( XRD ) , Fourier transform infrared spectrometer ( FTIR ) , Scanning electron microscopy ( SEM ) and Atomic force microscope ( AFM ) , respectively .The results show that the smooth and dense ZrSiO 4 film without cracking could be coated on the monocrystalline silicon when the precursor concentration is 0 .1 mol/L and the lifting rate is 1 mm/s.Monocrystalline silicon coated ZrSiO 4 film was soaked in 40％ NaOH solution for 42 h at 40 ℃, only a relatively small pit corrosion on the surface was found , the mass varies a little with the corrosion time and the mass loss was only 0 .17％, which indicate that the ZrSiO 4 film had good alkali corrosion resistance .关键词
硅酸锆/薄膜/非水解溶胶-凝胶法/抗腐蚀Key words
zirconium silicate/thin film/non-hydrolytic sol-gel method/corrosion resistance分类
化学化工引用本文复制引用
谭广繁,胡庆,江伟辉,刘健敏,冯果,陈婷,李聪..非水解溶胶-凝胶法制备硅酸锆薄膜及抗碱腐蚀性能[J].人工晶体学报,2017,46(12):2393-2398,2416,7.基金项目
国家自然科学基金(51362014,51602136) （51362014,51602136）
江西省自然科学基金(20171BAB216010) （20171BAB216010）
江西省教育厅基金(GJJ160918) （GJJ160918）
