物理学报2018，Vol.67Issue(2)：18-25,8.DOI:10.7498/aps.67.20171837
频差偏差对全视场外差测量精度的影响
Effect of frequency difference deviation on full-field heterodyne measurement accuracy
摘要
Abstract
With the advantages of high precision and great environmental adaptability, laser heterodyne interferometry has been successfullyused in some areas, such as measuring distance and angle and other point detection. The Hertz-level frequency-shifting technology greatly improves the accuracy and stability of surface measurement and extends its appli-cation to the areas of array detection,such as three-dimensional topography measurement,smooth surface measurement, digital holography, speckle measurement, etc. The frequency difference of heterodyne interferometry is realized by acousto-optic frequency shifter under the control of two radio frequency signals each with a fixed frequency value. How-ever, a deviation of the real value from the design value of frequency always exists, which is referred to as frequency difference deviation. It causes the heterodyne frequency and the frame rate of the array detector to be unable to be strictly matched, thus affecting the improvement of measurement accuracy. According to the theory of full-field het-erodyne measurement, we derive the relationship between frequency difference deviation and measurement accuracy of the heterodyne measurement instrument,and analyze the effects of relevant parameters including the value of frequency difference,frequency deviation,initial sampling time,initial phase,sampling frequency,and sampling cycles on measure-ment accuracy. A method of improving the measurement accuracy is proposed by reasonably selecting the sampling time and frame number. Analysis shows that the initial sampling time and initial phase have the same effect on the measure-ment accuracy. With the reasonable choosing of measurement parameters and processing methods, the measurement accuracy of the instrument could be greatly improved. In addition,the peak value of full-field heterodyne measurement error is linearly related to the frequency difference deviation. In the case of a certain frequency difference deviation,the instrument could achieve a higher measurement accuracy with greater frequency difference,but requires a higher frame rate of detector at the same time. As a result, designers should choose an appropriate value of frequency difference for measurement instrument. Furthermore,increasing the sampling frequency could also improve the measurement accuracy. Actually,if sampling frames are more than fifteen in a single cycle,the improvement of measurement accuracy would be limited. Multi-period sampling has little effect on measurement error caused by frequency difference deviation,and the measurement error is the limiting value of measurement accuracy that the instrument could reach. Therefore,this study could be used as a theoretical basis of the design and parameter selection and also the measurement accuracy analysis for full-field heterodyne measurement instrument development.关键词
全视场外差/干涉测量/频差偏差/精度分析Key words
full-field heterodyne/interference measurement/frequency difference deviation/accuracy analysis引用本文复制引用
伍洲,张文喜,相里斌,李杨,孔新新..频差偏差对全视场外差测量精度的影响[J].物理学报,2018,67(2):18-25,8.基金项目
国家自然科学基金青年科学基金(批准号:61605217)和中国科学院青年创新促进会(批准号:2015127)资助的课题. Project supported by the Young Scientists Fund of the National Natural Science Foundation of China(Grant No. 61605217) and the Youth Innovation Promotion Association, Chinese Academy of Sciences (Grant No. 2015127). （批准号:61605217）
