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基于锡组分和双轴张应力调控的临界带隙应变Ge1−xSnx能带特性与迁移率计算

底琳佳 戴显英 宋建军 苗东铭 赵天龙 吴淑静 郝跃

物理学报2018,Vol.67Issue(2):199-212,14.
物理学报2018,Vol.67Issue(2):199-212,14.DOI:10.7498/aps.67.20171969

基于锡组分和双轴张应力调控的临界带隙应变Ge1−xSnx能带特性与迁移率计算

Calculations of energy band structure and mobility in critical bandgap strained Ge1?xSnxbased on Sn component and biaxial tensile stress modulation

底琳佳 1戴显英 1宋建军 1苗东铭 1赵天龙 1吴淑静 1郝跃1

作者信息

  • 1. 西安电子科技大学微电子学院,宽带隙半导体技术国家重点学科实验室,西安710071
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摘要

Abstract

Optoelectronic integration technology which utilizes CMOS process to achieve the integration of photonic devices has the advantages of high integration,high speed and low power consumption. The Ge1?xSnxalloys have been widely used in photodetectors,light-emitting diodes,lasers and other optoelectronic integration areas because they can be converted into direct bandgap semiconductors as the Sn component increases. However,the solid solubility of Sn in Ge as well as the large lattice mismatch between Ge and Sn resulting from the Sn composition cannot be increased arbitrarily: it is limited,thereby bringing a lot of challenges to the preparation and application of direct bandgap Ge1?xSnx. Strain engineering can also modulate the band structure to convert Ge from an indirect bandgap into a direct bandgap, where the required stress is minimal under biaxial tensile strain on the (001) plane. Moreover, the carrier mobility, especially the hole mobility, is significantly enhanced. Therefore, considering the combined effect of alloying and biaxial strain on Ge, it is possible not only to reduce the required Sn composition or stress for direct bandgap transition,but also to further enhance the optical and electrical properties of Ge1?xSnxalloys. The energy band structure is the theoretical basis for studying the optical and electrical properties of strained Ge1?xSnxalloys. In this paper,according to the theory of deformation potential,the relationship between Sn component and stress at the critical point of bandgap transition is given by analyzing the bandgap transition condition of biaxial tensile strained Ge1?xSnxon the (001) plane. The energy band structure of strained Ge1?xSnxwith direct bandgap at the critical state is obtained through diagonalizing an 8-level k·p Hamiltonian matrix which includes the spin-orbit coupling interaction and strain effect. According to the energy band structure and scattering model, the effective mass and mobility of carriers are quantitatively calculated. The calculation results indicate that the combination of lower Sn component and stress can also obtain the direct bandgap Ge1?xSnx,and its bandgap width decreases with the increase of stress. The strained Ge1?xSnxwith direct bandgap has a very high electron mobility due to the small electron effective mass,and the hole mobility is significantly improved under the effect of stress. Considering both the process realization and the material properties, a combination of 4% Sn component and 1.2 GPa stress or 3% Sn component and 1.5 GPa stress can be selected for designing the high speed devices and optoelectronic devices.

关键词

双轴张应变Ge1−xSnx/k·p方法/能带结构/迁移率

Key words

biaxial tensile strained Ge1−xSnx/k·p method/energy band structure/mobility

引用本文复制引用

底琳佳,戴显英,宋建军,苗东铭,赵天龙,吴淑静,郝跃..基于锡组分和双轴张应力调控的临界带隙应变Ge1−xSnx能带特性与迁移率计算[J].物理学报,2018,67(2):199-212,14.

基金项目

国家部委重点基金(批准号:9140A08020115DZ01024)和中国博士后科学基金(批准号:2017M613061)资助的课题. Project supported by the Advance Research Foundation of China (Grant No. 9140A08020115DZ01024) and the China Postdoctoral Science Foundation (Grant No. 2017M613061). (批准号:9140A08020115DZ01024)

物理学报

OA北大核心CSCDCSTPCDSCI

1000-3290

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