传感技术学报2018，Vol.31Issue(1)：48-53,6.DOI:10.3969/j.issn.1004-1699.2018.01.009
驱动微梁形状对微陀螺仪耦合误差的影响分析
Analysis of the Influence of Driving Micro Beam Shape on MEMS Gyroscope Coupling Error
摘要
Abstract
Under the machining deviation,in order to study the effect of the microgyroscope drivingmicrobeam Shape Variation on orthogonal coupling Error,modal coupling and detection Signal. The finite element analysis model of the driving microbeam under the diagonal beam width error is established,the influence of the variation of the length of one end of U-beam on the orthogonal coupling error,modal coupling and detection signal of micro-gyroscope is provided by combining the method of elemental simulation and analytic calculation. It is found that when the beam length of one end of U-beam is about one half of the length of the other end,this kind of machining deviation will cause very serious orthogonal coupling error and modal coupling phenomenon,and it have great influence on the de-tection signal. When the U-beam is degraded into a straight beam or an equal length beam,the interference of the detection signal is very small,the orthogonal coupling error is zero,the modal coupling degree is the smallest,and the variation rule of the two is positively correlated. Increasing the frequency spacing between the driving mode and detecting mode of the single degree of freedom microgyroscope. Not only adding the bandwidth of microgyroscope, but also reducing the influence of coupling.关键词
微陀螺/加工误差/微梁形状/正交误差/模态耦合Key words
micro gyroscope/machining error/micro beam shape/orthogonal error/modal coupling分类
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郝淑英,张辰卿,齐成坤,李会杰,张昆鹏,陈炜..驱动微梁形状对微陀螺仪耦合误差的影响分析[J].传感技术学报,2018,31(1):48-53,6.基金项目
项目来源:国家自然科学基金项目( 11372210) （ 11372210）
