物理学报2018，Vol.67Issue(4)：237-245,9.DOI:10.7498/aps.67.20171914
基于金刚石色心自旋磁共振效应的微位移测量方法
A method of measuring micro-displacement based on spin magnetic resonance effect of diamond color center
摘要
Abstract
As one of the excellent piezoelectric materials, piezoelectric ceramic has been widely used to develop a highly precise displacement measurement system, which is the key part of the scanning probe system of the high-precision measuring instrument. Based on the high-precision scanning probe system, the micro/nano structures can be easily and accurately detected by the instrument system. However, due to the limitations caused by the character of hysteresis and nonlinearity, it is difficult to further improve the precision of highly precise displacement measurement system. In this work, we present a novel method to develop the highly precise displacement measurement system based on the quantum spin effect. The nitrogen vacancy (NV) color center of single crystal diamond as a sensitive element senses the change of the micro-displacement. Based on the electron spin magnetic resonance effect of diamond nitrogen vacancy color center, the variation of the magnetic field generated from the magnetic steel can be detected with high precision by the electron spin. The relative relation between the displacement and the magnetic gradient field can be used to establish the correlation model between the displacement and the electron spin resonance peak. In the experiment, a corresponding micro-displacement measurement system is established based on the cylindrical permanent magnet, according to the correlation model between the electron spin resonance effect and micro-displacement. The linear region of magnetic field gradient is designed to detect the micro-displacement. Firstly, the intensity distribution of magnetic field gradient is measured by the gauss meter. As the measurement results show, the gradient value is?7.77 Gauss/mm along the core axis of cylindrical permanent magnet, and the intensity of magnetic field gradient distribution region is linear in the millimeter range. Meanwhile, the electron spin magnetic resonance peak of diamond nitrogen vacancy color center is achieved by the optically detected magnetic resonance technology. The electron spin magnetic resonance peak is approximately 2.79 MHz/Gauss in the magnetic field achieved by the fluorescence spectrum of diamond nitrogen vacancy color center, attributed to the relation model between Zeeman splitting effect and magnetic field. In the experiment, the electron spin magnetic resonance signal of diamond nitrogen vacancy color center is locked-in by the demodulation method to achieve the change of micro-displacement. As the results show, the sensitivity is about 16.67 V/mm at the corresponding demodulation frequency of 3000.56 MHz. By the calculation, the resolution of micro-displacement measurement system is about 60 nm based on our method. It proves out a high precision and well reliability method to detect the micro-displacement. By the further theoretical calculation, based on the electron spin effect, the detection resolution of our method can be enhanced up to sub-nanometer scale by reducing the distance between the NV color center and the magnet. It presents a new research direction and field for the micro-displacement detection system.关键词
金刚石氮空位色心/微位移测量/自旋磁共振/精密测量Key words
diamond nitrogen vacancy color center/micro-displacement measurement/spin magnetic resonance/precision measurement引用本文复制引用
王磊,朱强,唐军,刘俊,郭浩,陈宇雷,伍大锦,赵锐,刘文耀,李春明,夏美晶,赵彬彬..基于金刚石色心自旋磁共振效应的微位移测量方法[J].物理学报,2018,67(4):237-245,9.基金项目
国家自然科学基金国家重大科研仪器研制项目(批准号: 51727808)、国家自然科学基金重点项目(批准号: 51635011)、山西省青年拔尖人才计划(批准号: 2016002) 和山西省"1331工程"重点学科建设计划经费资助的课题.Project supported by the National Major Scientific Instrument Research and Manufacture Program of the National Natural Science Foundation of China (Grant No. 51727808), the Key Fund Program of the National Natural Science Foundation of China (Grant No. 51635011), the Outstanding Youth Talents Program of Shanxi Province, China (Grant No. 2016002), and the Shanxi "1331Project" Key Subjects Construction, China. （批准号: 51727808）
