激光技术2018，Vol.42Issue(2)：276-281,6.DOI:10.7510/jgjs.issn.1001-3806.2018.02.026
红外激光刻蚀微热管复合沟槽的工艺研究
Study on etching process of composite grooves on micro heat pipes with infrared laser
摘要
Abstract
In order to find the effects of different process parameters(laser repetition frequency, laser scanning velocity, laser scanning times) on the dimension and the morphology of composite grooves during laser etching of surface composite grooves on micro heat pipe, a series of experiments were carried out by single factor experimental method. The reasonable process parameters of 1064nm wavelength fiber laser were confirmed. The experimental results show that,under the conditions of 40kHz laser repetition frequency,150mm/s laser scanning velocity and 25 laser scanning times, composite grooves can provide larger capillary pressure for liquid reflux in micro heat pipe. This study is of great significance to improve the heat transfer performance of grooved micro heat pipes.关键词
激光技术/激光刻蚀/复合沟槽/影响规律/最大毛细压力/微热管Key words
laser technique/laser etching/composite grooves/influence law/maximum capillary pressure/micro heat pipe分类
信息技术与安全科学引用本文复制引用
杨旸,魏昕,谢小柱,胡伟,李成彬..红外激光刻蚀微热管复合沟槽的工艺研究[J].激光技术,2018,42(2):276-281,6.基金项目
国家自然科学基金资助项目(50675038 （）
51175092) （）
广东省自然科学基金资助项目(S2013010014070) （S2013010014070）
广州市科技计划资助项目(20160710156) （20160710156）
