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磨料尺寸对固结金刚石聚集体磨料垫研磨石英玻璃加工性能的影响

凌顺志 墨洪磊 汪忠喜 朱永伟

金刚石与磨料磨具工程2017,Vol.37Issue(5):12-18,7.
金刚石与磨料磨具工程2017,Vol.37Issue(5):12-18,7.DOI:10.13394/j.cnki.jgszz.2017.5.0002

磨料尺寸对固结金刚石聚集体磨料垫研磨石英玻璃加工性能的影响

Effect of abrasive sizes on processing characteristics of fixed diamond aggregations pad lapping quartz glass

凌顺志 1墨洪磊 2汪忠喜 1朱永伟1

作者信息

  • 1. 南京航空航天大学机电学院,南京210016
  • 2. 航天八院803研究所,上海201109
  • 折叠

摘要

Abstract

Lapping quartz glass is the former process of its ultra-smooth polishing process,which greatly affects its machining efficiency and final surface quality.To meet the hard and brittle characteristics of the quartz glass,a new fixed diamond aggregation pad (FDAP) was employed to study the high efficiency and low damage lapping process.The effect of original abrasive size,secondary abrasive size,applied load and slurry flow rate on the lapping performance was explored.After comprehensive optimization,the process parameters with high processing efficiency and excellent surface quality were obtained.The results show that the FDAP exhibits an excellent lapping performance.When the original abrasive size and secondary abrasive grain size are 1.0~2.0 μm and 20 ~25 μm respectively,with load 14 kPa and slurry flow rate 60 mL/min,the material removal rate of quartz glass reaches 2.64 μm/min and average surface roughness Ra is 54.2 nm.

关键词

石英玻璃/固结金刚石聚集体垫/原始颗粒/材料去除率/表面粗糙度

Key words

quartz glass/fixed diamond aggregation pad/original abrasive size/material removal rate/surface roughness

分类

矿业与冶金

引用本文复制引用

凌顺志,墨洪磊,汪忠喜,朱永伟..磨料尺寸对固结金刚石聚集体磨料垫研磨石英玻璃加工性能的影响[J].金刚石与磨料磨具工程,2017,37(5):12-18,7.

基金项目

国家自然科学基金(51675276) (51675276)

南京航空航天大学研究生创新基地开放基金(kfjj20160502). (kfjj20160502)

金刚石与磨料磨具工程

OA北大核心CSTPCD

1006-852X

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