人工晶体学报2018，Vol.47Issue(1)：102-107,6.
蓝宝石衬底材料的研究及应用进展
Research and Application Progress of Sapphire Substrates
摘要
Abstract
As the main substrate material of GaN-based optoelectronic devices,sapphire is widely used in the field of optoelectronics because of its mature production technology, the excellent stability and high ratio of performance to cost.The GaN film growth by traditional sapphire substrate presents many problems,such as lattice mismatch and thermal stress mismatch caused by lattice constant difference, which makes the poor crystallization quality of GaN films and low efficiency of light extraction.It covers the application of patterned sapphire substrate in the fabrication of GaN-based LED devices, comparing the influence of several graphical substrates on the luminescence performance of LED.The AlN film grown by PVD on sapphire substrate can reduce the helical dislocation and edge dislocation of GaN films, increase the growth efficiency of MOCVD, and significantly improve the utilization of equipment.In addition,the application of sapphire substrate in the field of SOS has been introduced, and the specific requirements of sapphire substrate for SOS process have been listed as well.Sapphire as an important substrate material will have a bright future in its application.关键词
图形化蓝宝石衬底/PVD法生长AlN/SOSKey words
patterned sapphire substrate/PVD aluminum nitride/SOS分类
化学化工引用本文复制引用
考政晓,叶大千,于璇,张保国..蓝宝石衬底材料的研究及应用进展[J].人工晶体学报,2018,47(1):102-107,6.基金项目
河北省高层次人才资助项目百人计划项目(E2013100006) （E2013100006）
河北省科技计划资助项目(15211017D) （15211017D）
