人工晶体学报2017，Vol.46Issue(11)：2102-2106,5.
衬底温度对碲化镉薄膜结构及光学性能的影响
Effect of Substrate Temperature on Structure and Optical Properties of CdTe Films
摘要
Abstract
Cadmium telluride (CdTe) is often used as an absorbent material for solar cells because of its excellent photoelectric properties and absorption properties.The CdTe thin films were deposited with a purity of 99.99％ CdTe ceramic target for target material by RF magnetron sputtering on glass substrate.The effects of substrate temperature on the thickness,structure and optical properties of the CdTe films were investigated.The results show that with the increase of the substrate temperature,the thickness of the film decreases.All CdTe thin films are cubic sphalerite structure with a preferred orientation in (111) direction.The film has better absorption properties to visible light and decreases with the increase of substrate temperature.关键词
吸收层/CdTe薄膜/射频磁控溅射/衬底温度Key words
absorbent material/CdTe film/RF magnetron sputtering/substrate temperature分类
数理科学引用本文复制引用
杨恢东,张翠媛,王菁,陈玉玲,彭炳荣,刘辉..衬底温度对碲化镉薄膜结构及光学性能的影响[J].人工晶体学报,2017,46(11):2102-2106,5.基金项目
广东大学生科技创新培育专项资金项目(pdjh2017b0056) （pdjh2017b0056）
广东省省级科技计划项目(2014A010106014) （2014A010106014）
暨南大学韶关研究院新型研发机构初创期建设补助项目(2016B090919014) （2016B090919014）
