西北师范大学学报（自然科学版）2018，Vol.54Issue(2)：43-48,6.DOI:10.16783/j.cnki.nwnuz.2018.02.008
双频大气压冷等离子体射流制备TiO2的表面形貌研究
Surface morphology study of TiO2prepared by dual frequency atmospheric Pressure cold plasma jet
摘要
Abstract
Titanium oxide(TiO2) films are prepared in Ar/O2 atmospheric pressure cold plasma jet driven by dual-frequency in this paper.The titanium tetraisopropoxide(TTIP)carried by N2 is used as the precursor.The effect of discharge parameters on morphology of TiO2 is studied.The result of scanning electron microscopy(SEM)indicates that the TiO2 posses different surface morphology like nano fibrous, sphere and collapse sphere in different discharge parameters.The results of Raman shift spectroscopy demonstrate that TiO2crystals consist of anatase and rutile.Optical properties and electrical properties of plasma are detected by spectrograph and octiv suite sensor unit.关键词
双频大气压冷等离子体射流/二氧化钛薄膜/表面形貌Key words
dual-frequency atmospheric pressure plasma jet/TiO2 films/surface morphology分类
数理科学引用本文复制引用
袁强华,李洋,张亚东,鉴霄阳..双频大气压冷等离子体射流制备TiO2的表面形貌研究[J].西北师范大学学报（自然科学版）,2018,54(2):43-48,6.基金项目
国家自然科学基金资助项目(11665021) （11665021）
