液晶与显示2017，Vol.32Issue(12)：956-960,5.DOI:10.3788/YJYXS20173212.0956
叠层方式形成彩色滤光片隔垫物的研究
Forming photo spacer by layer stacking on TFT-LCD CF substrate
摘要
Abstract
The key issue of forming photo spacer by layer stacking on TFT-LCD CF substrate,such as height control,main-sub difference tuning and the variation of main-sub different after OC process is investigated.Corresponding solution has been proposed.A shape-following OC material is used to control PS height by tuning OC thickness,which indicates that the thickness of BM,Red,Green,Blue layer won't has to be changed to achieve certain stacking height.The main-sub difference can be acquired by changing pattern size of each Stacking layers.The tuning range of main-sub difference is 0.4～1.2 μm,which already reaches the level of half tone mask technology,but at much lower cost.It is confirmed that the main-sub difference formed by BM/R/G/B layer stacking can be maintained after OC process.A prototype of 4 mask Color filter is fabricated,based on stacking photo spacer technology.关键词
彩色滤光片/叠层隔垫物/形貌追随型平坦化材料Key words
color filter/stacking photo spacer/shape-following/OC material分类
数理科学引用本文复制引用
舒适,齐永莲,徐传祥,张锋,崔承镇..叠层方式形成彩色滤光片隔垫物的研究[J].液晶与显示,2017,32(12):956-960,5.基金项目
京东方科技集团股份有限公司研发项目基金(No.2013013)BOE R&D Project Fund (No.2013013) （No.2013013）
