传感技术学报2018，Vol.31Issue(2)：175-179,5.DOI:10.3969/j.issn.1004-1699.2018.02.003
三轴高g值加速度传感器的测试技术研究
Test Technology Research on Three-Axis High-g Accelerometer
摘要
Abstract
For the design of the sensitive structure of piezoresistive sensor,an sensitive structure of three-axis accel-erometer is proposed. The sensitivity,linearity and cross-coupling error parameters of the sensor was calibrated by Hopkinson bar impact test.And a dynamic penetration test of high impact and large pulse width load was carried out for the calibrated sensor. The test results show that under the impact load of 48 000 gnamplitude and 3ms pulse width,15 000 gnamplitude and 13ms pulse width,the displacement error of the sensor test was 6%,and the sensor reliability is good enough to meet the needs of high-impact and pulse width testing.关键词
MEMS/三轴加速度传感器/标定/高g值/侵彻试验/大脉宽Key words
MEMS/three-axis accelerometer/calibration/high-g/penetration test/large pulse width分类
信息技术与安全科学引用本文复制引用
陈宏亮,马少杰,张英忠,张锦明..三轴高g值加速度传感器的测试技术研究[J].传感技术学报,2018,31(2):175-179,5.基金项目
国家部委"十三五"预先研究项目(41417020501) （41417020501）
