传感技术学报2018,Vol.31Issue(2):185-189,5.DOI:10.3969/j.issn.1004-1699.2018.02.005
适应温度变化的石英晶体微天平微小颗粒测量技术
Quartz Crystal Microbalance Measurement Technology for Tiny Particles Adapted to Temperature Variation
摘要
Abstract
Coating sticking film on the surface of a quartz crystal microbalance(QCM)could form SQCM,which was conducive to the realization of accurate measurement of tiny particles,but the SQCM measurement results were af-fected by the temperature. Aiming at this problem,according to the analysis on the simple harmonic motion of the SQCM model,the relationship between the temperature and the elastic coefficient of the sticking film was estab-lished,so as to effectively reflect the influence of the temperature on the SQCM resonant angular frequency. With the analysis on experiment results,the SQCM no-load frequency-temperature characteristic curve and the mass sen-sitivity coefficient-temperature curve with load were fitted in the temperature range of -25℃~60℃,which formed the basis for inquiry and modification,so as to make the SQCM measurement for tiny particles adaptable and accu-rate with wide temperature range.关键词
石英晶体微天平/粘性薄膜/简谐振动/频温特性/微小颗粒Key words
quartz crystal microbalance/sticking film/simple harmonic motion/frequency-temperature characteristic/tiny particles分类
信息技术与安全科学引用本文复制引用
徐晓冬,魏列江,强彦..适应温度变化的石英晶体微天平微小颗粒测量技术[J].传感技术学报,2018,31(2):185-189,5.基金项目
甘肃省科技计划项目(148RJYA005) (148RJYA005)
兰州市科技计划项目(2015-3-98) (2015-3-98)