红外与毫米波学报2017，Vol.36Issue(6)：650-654,5.DOI:10.11972/j.issn.1001-9014.2017.06.003
一种高集成高空间分辨率220GHz检波器
A 220GHz high integration and high resolution detector
摘要
Abstract
A high-integration detector which consists of a patch antenna,a matching circuit,schottky diodes (SBD) and lenses has been developed.The integration of detectors is increased obviously comparing with that of separated detectors by integrating antennas,matching circuits and SBD on a chip in SMIC 130 mm.To improve the directivity of the antenna on chip,the nylon lens with air cave was designed and optimized.The air cave in lens not only provides space for assembling but also reduces the size of lens.It was calculated through testing that the antenna gain at 220 GHz is 22 dB,in which the contribution of lens is about 20 dB.The tested responsivity of the detector can achieve 130-150 V/W and the noise equivalent power (NEP) is estimated to be 400 ～460 pW/√Hz.关键词
太赫兹(THz)检波器/互补金属氧化物半导体工艺/肖特基二极管/透镜天线Key words
terahertz detector/CMOS/Schottky diode/lens antenna分类
信息技术与安全科学引用本文复制引用
崔大圣,丁正之,郝海东,吕昕..一种高集成高空间分辨率220GHz检波器[J].红外与毫米波学报,2017,36(6):650-654,5.基金项目
Supported by National Natural Science Foundation of China (61527805) （61527805）
