人工晶体学报2018，Vol.47Issue(2)：261-266,6.
板片状Al2O3磨料对碲锌镉晶体机械研磨的影响
Effect of Plate-like Al2O3Abrasives on Mechanical Lapping of CdZnTe Crystals
摘要
Abstract
Al2O3abrasives with different shapes were used for the mechanical lapping of CdZnTe crystals. The effect and influence mechanism of particle shape and particle size on the removal rate and morphology of the lapped wafer surfaces were investigated.Research shows that the polygonal abrasives with irregular shape are prone to generate scratches on the wafer surface, and they are easy to scroll between the grinding disc and the wafer surface,resulting in the decrease of removal rate.The plate-like abrasives are prone to become two-body type abrasive since they are difficult to scroll.Thus, the wafer surfaces are gouged through the edges of plate-like abrasives.The thin plate-like abrasives with clear edges are beneficial to the mechanical lapping of CdZnTe, and the removal rate increases with the increase of particle size.However,it is easy to generate deep pits when the abrasives with big size are used.By contrast,the plate-like abrasives which are round and smooth are disadvantageous to the removal rate. Improved removal rate and surface qualities can be obtained by the thin plate-like Al2O3abrasives with D50of 3.34 μm,including low waviness value(Wa)and pit area ratio.关键词
CdZnTe晶体/机械研磨/板片状Al2O3磨料/去除机理Key words
CdZnTe crystal/mechanical lapping/plate-like Al2O3abrasive/removal mechanism分类
矿业与冶金引用本文复制引用
毛晓辰,朱丽慧,虞慧娴,周昌鹤,孙士文,陈燕..板片状Al2O3磨料对碲锌镉晶体机械研磨的影响[J].人工晶体学报,2018,47(2):261-266,6.基金项目
红外成像与器件重点实验室开放基金 （）
