真空电子技术Issue(1)：39-41,3.DOI:10.16540/j.cnki.cn11-2485/tn.2018.01.07
近场微波显微镜对石墨烯的无损检测研究
Research on Nondestructive Measurement of Graphene Films Based on NSMM
摘要
Abstract
We build up a near-field scanning microwave microscope (NSMM) which can test the properties of thin film.By detecting the Q factor of resonant cavity and the offset of the resonant frequency when probe is close to samples,physical characteristics including dielectric constant and electrical conductivityof samples can be obtained effectively with software-simulating.Material properties of graphene films were characterized by non-contact test method.关键词
石墨烯/检测/近场扫描微波显微镜Key words
Graphene/Detect/Near-field scanning microwave microscopy分类
信息技术与安全科学引用本文复制引用
彭坤,吴喆,杨山,柳建龙,曾葆青..近场微波显微镜对石墨烯的无损检测研究[J].真空电子技术,2018,(1):39-41,3.基金项目
国家自然科学基金(61301053和61601101) （61301053和61601101）
中央高校基本科研业务费ZYGX2016J060和ZYGX2016KYQD097 （）
