真空电子技术Issue(1)：48-51,4.DOI:10.16540/j.cnki.cn11-2485/tn.2018.01.10
微波频率与功率对微波等离子体参数的影响
Effects of Microwave Frequency and Microwave Power on Plasma Parameters
摘要
Abstract
This paper introduces the effects of microwave frequency and microwave power on the plasma parameters,such as electron density,electron temperature,gas temperature and flame length.The numerical multiphysics simulation is operated by COMSOL Multiphysics which is based on finite element method (FEM).The calculation results show that the electron density,the electron temperature and the gas temperature increase with the increasing of microwave input power,and the plasma generated by the microwave of 2450 MHz has better performance than that by 915 MHz.Plasma flame lengths with different input power are measured and the results show that the input power has little effect on flame length.关键词
微波功率/微波频率/等离子体参数Key words
Microwave power/Microwave frequency/Plasma parameters分类
信息技术与安全科学引用本文复制引用
肖玮,曾晓勇,朱铧丞,黄卡玛..微波频率与功率对微波等离子体参数的影响[J].真空电子技术,2018,(1):48-51,4.基金项目
国家重点基础研究发展计划(973计划)2013CB328900和2013CB328905 （973计划）
