传感技术学报2018，Vol.31Issue(3)：334-341,8.DOI:10.3969/j.issn.1004-1699.2018.03.003
工艺误差对盘式耦合谐振滤波器的影响
The Influence of Fabrication Error on MEMS Disk Resonator-Based Filter
摘要
Abstract
MEMS resonator array has the advantages of reducing the motion resistance and improving the power han-dling capability,however the performance of the coupled array is very sensitive to the structural characteristics of the coupling beam. Therefore,the influence of shape of the coupling beam caused by fabrication error on disk resonator-based filter is analyzed.The structural and performance parameters of the resonator-based filter under different incli-nation angle of the coupling beam are theoretically analyzed and simulated by ANSYS. The results show that the center frequency varies 10×10-6,24×10-6and 51×10-6respectively,when the inclination angle reaches 0.1°,0.2° and 0.5° respectively. And when the inclination angle reaches 0.5°,the fractional band-width deviation will reach 5.6%. A resonator-based filter coupled by semi-high-type coupling beam is proposed,which is 4×better than con-ventional disk resonator-based filter with regard to stability.关键词
MEMS滤波器/MEMS谐振器/倾斜效应/MEMS谐振器阵列Key words
MEMS filter/MEMS resonator/inclination effects/MEMS resonator array分类
信息技术与安全科学引用本文复制引用
李豪,郑梦萍,董林玺..工艺误差对盘式耦合谐振滤波器的影响[J].传感技术学报,2018,31(3):334-341,8.基金项目
国家自然科学基金项目(61376117) （61376117）
