传感技术学报2018，Vol.31Issue(3)：363-367,5.DOI:10.3969/j.issn.1004-1699.2018.03.008
基于激励-校准法的硅微陀螺仪模态匹配控制电路研究
Research on Mode-Matching Control Circuit for Micromechanical Silicon Gyroscope Based on Excitation-Calibration Alibration Technology
摘要
Abstract
A real-time mode-matching control circuit for micromechanical silicon gyroscope based on excitation-cali-bration method is presented in this paper.The symmetry characteristic of sense mode response is exploited by injecting excitation signals mixed with two pilot tones having specific frequencies into sense mode. The tuning voltage is ac-quired by calculating the amplitude difference between two response signals of pilot tones. The principle of frequency tuning technology based on electrostatic negative stiffness is reported at first.Then,the proposed mode-matching meth-od is presented and the introduced tuning error is analyzed. The mode-matching model built in Simulink verifies the feasibility of the proposed frequency tuning technology.The automatic mode-matching control circuit is designed based on FPGA. Experimental results indicate that zero bias stability decreases from 1.69°/h to 0.42°/h and the static per-formance is improved by 4.02 times. Angular random walk decreases from 0.046 °/ h to0.0195 °/ h and the static performance is improved by 2.36 times.关键词
硅微陀螺仪/模态匹配/激励-校准/静电负刚度/零偏Key words
micromechanical silicon gyroscope/mode-matching/excitation-calibration/electrostatic negative stiffness/zero bias分类
航空航天引用本文复制引用
吴磊,杨波,王刚..基于激励-校准法的硅微陀螺仪模态匹配控制电路研究[J].传感技术学报,2018,31(3):363-367,5.基金项目
航空科学基金项目(20150869005) （20150869005）
