测控技术2018，Vol.37Issue(1)：107-109,124,4.
基于激光干涉技术的大尺寸绝对测量方法的研究
Research on Large Size Absolute Measurement Method Based on Laser Interference Technology
摘要
Abstract
In the process of manufacturing,large size workpiece is faced with a variety of detection tasks,large size measurement technology is becoming a more and more important branch of modem testing technology.In order to improve the static geometry precision of large size workpiece,two kinds of large size and high precision absolute measurement methods based on laser interferometry were put forward by combining the laser interferometer with the traditional length measuring machine.Through the theoretical analysis and experimental comparison of measurement uncertainty,the accuracy and feasibility of the methods were validated.The dynamic measurement of the traditional laser interferometer is converted into a high precision static testing,which not only expands the application field of the laser interferometer,but also improves the measuring accuracy and detection efficiency of the length measuring machine.关键词
测长机/激光干涉仪/绝对测量/大尺寸测量/不确定度Key words
length measuring machine/laser interferometer/absolute method of measurement/large size measurement/uncertainty分类
通用工业技术引用本文复制引用
刘红光,路瑞军,崔尧尧,冉勇,李凌梅,马艺清..基于激光干涉技术的大尺寸绝对测量方法的研究[J].测控技术,2018,37(1):107-109,124,4.基金项目
基金资助:天津市市场和质量监督管理委员会2016年度科技项目(2016-W01) （2016-W01）
