光学精密工程2017，Vol.25Issue(12)：3012-3019,8.DOI:10.3788/OPE.20172512.3012
闪耀透射光栅衍射规律的分析和验证
Analysis and verification of diffraction rules of blazed transmission grating
摘要
Abstract
Based on the scalar theory,the influence of the blazed transmission grating with different groove angles or different groove densities on the used wavelength was researched and the energy distribution of the diffraction light of the blazed transmission grating was deduced.It was concluded that the relationship between the diffraction angle and the incident angle of the diffracted grating in the diffraction direction with the strongest energy could satisfy the Snell's law.The relationship among the angle of incidence,diffraction angle and groove angle was given,and the energy distribution law of the diffracted light at different groove densities and groove angles was studied.Then,the blazed transmission gratings were measured.It is shown that the characteristics of the existing blazed transmission gratings are consistent with that of theoretical calculation.A polydimethylsiloxane (PDMS) period-tunable blazed transmission grating was fabricated.Then,the blazed wavelength and groove density of the PDMS blazed transmission grating were measured in both stretched and free state by using the deduced formula.The results show that the measurement error of the wavelength is within 5 nm.The equivalent groove profile of the grating was fitted,which verifies the law that groove profile and groove density of the PDMS grating are changed with the tension changes in the real-time monitoring.关键词
透射光栅/闪耀光栅/衍射效率/闪耀角/闪耀波长Key words
transmission grating/blazed grating/diffraction efficiency/blazed angle/blazed wavelength分类
数理科学引用本文复制引用
黄元申,过军军,盛斌..闪耀透射光栅衍射规律的分析和验证[J].光学精密工程,2017,25(12):3012-3019,8.基金项目
国家重点研究发展计划资助项目(No.2016YFB1102303) （No.2016YFB1102303）
国家自然科学基金资助项目(No.61378060) （No.61378060）
国家重大仪器专项(No.2016YFF0101904) （No.2016YFF0101904）
