光学精密工程2017，Vol.25Issue(12)：3020-3026,7.DOI:10.3788/OPE.20172512.3020
面向可见光波段的非周期悬空GaN薄膜光栅
Freestanding non-periodic GaN gratings in visible wavelength region
摘要
Abstract
On the basis of Rigorous Coupled Wave Analysis(RCWA),an array of freestanding non-periodic GaN gratings were proposed to control the phase of an incident beam in the visible wavelength region.Firstly,the Finite Difference Time Domain(FDTD) method was used to calculate the optical responses of non-periodic GaN gratings based on the parameters such as period and duty cycle.Then,a double-sided process and nitride back thinning technology were developed to fabricate freestanding non-periodic GaN gratings on a GaN-on-silicon platformand to control the different phase shifts of incident light.Finally,the optical performance of non-periodic GaN gratings was experimentally demonstrated by angular resolved micro-reflectance spectra and photoluminescence spectra.The angular resolved micro-reflectance spectra show that the optical performance of the freestanding non-periodic GaN gratings is in good agreement with that of the theoretical simulations by the FDTD method.The photoluminescence spectra indicate that photoluminescence (PL) intensities of the GaN gratings are greatly improved as compared to that of the GaN-on-silicon,and their emission peaks are from 364.3nm to 378.7nm.Moreover,experimental results give that the incident angular tolerance of the GaN gratings is-25°-25° in the visible wavelength region.In conclusion,the gratings are helpful for the improvement of the light extraction efficiency.关键词
非周期GaN光栅/薄膜光栅/悬空薄膜/角分辨微反射谱/光致发光谱Key words
non-periodic GaN gratings/membrane grating/freestanding membrane/angular resolved micro-reflectance/photoluminescence分类
信息技术与安全科学引用本文复制引用
王永进,张锋华,高绪敏,施政..面向可见光波段的非周期悬空GaN薄膜光栅[J].光学精密工程,2017,25(12):3020-3026,7.基金项目
国家自然科学基金资助项目(No.61322112,No.61531166004) （No.61322112,No.61531166004）
国家重点研究发展计划资助项目(No.2016YFE0118400) （No.2016YFE0118400）
南京邮电大学科研基金资助项目(No.KYZZ16-0256) （No.KYZZ16-0256）
