光学精密工程2017，Vol.25Issue(12)：3027-3033,7.DOI:10.3788/OPE.20172512.3027
光栅复制拼接光路中入射光角度对拼接误差的影响
Influence of incident light angles on mosaic grating errors in optical path for grating replication and mosaic
摘要
Abstract
A measuring path for grating replication and mosaic was designed based on interferometric method.In consideration of the difficulty of measuring incident light angles in the optical path for grating replication and mosaic,the influence of the angle error of the incident light on the grating replication and mosaic was analyzed.A mathematical model of mosaic grating errors was established,and the tolerance of the mosaic grating errors was given.According the requirement of incident light angle in the optical path for grating replication and mosaic,an angle adjustment structure of the interferometer was designed.On the basis of error mathematical model and the mosaic path,the relation between the incident angle error and the mosaic grating errors was analyzed for a 5 000 mm × 500 mm large echelle grating.The results show that when the incident angle error is 1°,and the differences of calculation value and actual value for the △θx,△θy,△z (mosaic grating errors around the x,y,z axes)are 0.002 1 μrad,0.003 3 μrad,0.348 2 nm,respectively,the wavefront error is 2.590 1 nm.Accroding to the calculation and analysis,it shows that the angle adjustment structure of the interferometer needs a dividing plate of 0.1° as the min measuring range,which can meet the requirement of the grating mosaic.关键词
光栅拼接/光栅复制/拼接误差/误差分析Key words
grating mosaic/grating replication/mosaic error error analysis分类
数理科学引用本文复制引用
丛敏,齐向东,糜小涛,于海利,李晓天,卢禹先..光栅复制拼接光路中入射光角度对拼接误差的影响[J].光学精密工程,2017,25(12):3027-3033,7.基金项目
国家自然科学基金资助项目(No.61505204) （No.61505204）
吉林省青年人才基金资助项目(No.20170520167JH) （No.20170520167JH）
国家973重点基础研究计划资助项目(No.2014CB049500) （No.2014CB049500）
国家重大科研装备研制项目(No.ZDYZ2008-1) （No.ZDYZ2008-1）
重大科学仪器设备开发专项(No.2016YFF0103304) （No.2016YFF0103304）
国家重点研发计划(No.2016YFF0102006) （No.2016YFF0102006）
