光学精密工程2017，Vol.25Issue(12)：3048-3055,8.DOI:10.3788/OPE.20172512.3048
Parylene增强型声表面波传感器及其温度响应
Parylene-enhanced SAW sensor and its temperature response
摘要
Abstract
According to the requirement of Surface Acoustic Wave (SAW) sensors for quality factors,long life and low costs,a Parylene enhanced SAW sensor was developed.In consideration of metal stripping process,the LOR stripping rubber and AZ5214 double-layer spin-coating process were used to produce a trapezoidal structure,and the traditional optical lithography was used to fabricate a 2μm superfine fork finger electrode.By utilizing MEMS technology,the sensor implements the miniaturization,but also the quantified production.The obtained quartz-based sensor shows its resonant frequency to be 249.077 953 MHz.Finally,a Parylene polymer film was coated on the surface of the sensor to increase the temperature sensitivity of the substrate.The temperature sensitivities of unenhanced SAW sensor (uncoated parylene) and enhanced SAW sensor (coated parylene) were compared experimentally.The results indicate that the temperature sensitivity of the former is 2.048 kHz/℃ and that of the latter is 2.855 kHz/℃,which is higher 0.80 kHz/℃ than that of the former.Moreover,the resonant frequency offset and the temperature of the Parylene-enhanced SAW sensor show an excellent linearity,and the linear correlation coefficient reaches to 0.99615.These experiments demonstrate that performance of Parylene-enhanced SAW sensors is superior to that of the unenhanced SAW sensors.关键词
声表面波(SAW)传感器/倒梯形结构/金属剥离/Parylene增强/温度Key words
Surface Acoustic Wave(SAW) sensor/trapezoidal structure/metal stripping/parylene enhancement/temperature分类
信息技术与安全科学引用本文复制引用
李敬,潘海曦,郭振,李传宇,姚佳,周连群..Parylene增强型声表面波传感器及其温度响应[J].光学精密工程,2017,25(12):3048-3055,8.基金项目
国家863高技术研究发展计划资助项目(No.2015AA042603) （No.2015AA042603）
