光学精密工程2017，Vol.25Issue(12)：3120-3127,8.DOI:10.3788/OPE.20172512.3120
二维光电水平倾角测量系统
A two-dimensional photoelectric level inclination measuring system
摘要
Abstract
For error measurement and error compensation of large-scale machine tools in high-end equipment manufacture,a two-dimensional photoelectric level inclination measuring system was established based on the principle of optical auto-collimation and liquid surface reflection to measure the roll angle and the pitch angle of a machine tool.Firstly,a laser diode was used as a source of the system,and the inclination was doubled on the surface of the silicone oil through an optical auto-collimation system.Then,spot position changes were detected by a position sensitive detector,the photoelectric signal containing angle information was output and the four low noise Ⅰ-Ⅴ conversion and consistent amplifying circuits were used to amplify signals and to reduce errors.Finally,a high-speed data acquisition system was used to acquire data and to convert them into inclination information by mean filtering,curve fitting and solution processing to accomplish two-dimensional inclination measuriement.A contrast experiment was performed on an optical platform.The results show that the angle errors are less than ±0.050 mm/m (about ±10") and the linearity exceeds 0.25％ within the system measuring range of-10-10 mm/m (about-2 000"-2 000").It concludes that the system meets the requirements of large range,high precision and high stability and achieves two-dimensional level inclination measurement of large-scale machine tools rapidly.关键词
水平倾角测量/自准直/液体表面反射/均值滤波/曲线拟合Key words
level inclination measuring/auto-collimation/liquid surface reflection/mean filtering/curve fitting分类
通用工业技术引用本文复制引用
王洪远,段发阶,蒋佳佳,张聪..二维光电水平倾角测量系统[J].光学精密工程,2017,25(12):3120-3127,8.基金项目
国家重点研发计划资助项目(2017YFF0204800) （2017YFF0204800）
国家863计划资助项目(2013AA102402) （2013AA102402）
国家自然科学基金资助项目(No.61501319) （No.61501319）
天津市自然科学基金资助项目(No.17JCQNJC01100) （No.17JCQNJC01100）
光电信息与仪器北京市工程研究中心开放课题资助项目(No.GD2015007) （No.GD2015007）
海洋经济创新发展区域示范项目资助项目(No.cxsf2014-2) （No.cxsf2014-2）
教育部博士基金资助项目(No.20130032110054) （No.20130032110054）
微光机电系统技术教育部重点实验室(天津大学)开放基金资助项目(No.MOMST2015-7) （天津大学）
