强激光与粒子束2018，Vol.30Issue(5)：9-13,5.DOI:10.11884/HPLPB201830.170521
光谱共焦三维形貌仪用超大色散线性物镜组设计
Design of dispersive objective lens of large linear chromatic confocal 3D surface profiler
杨锐 1云宇 1解滨 2王安苏 2刘子维 2刘晨星1
作者信息
- 1. 中国久远高新技术装备公司,北京100094
- 2. 苏州大学 物理与光电·能源学院,江苏 苏州215006
- 折叠
摘要
Abstract
Chromatic confocal 3D profiler has high precision,large measuring range and strong adaptability.The key com-ponent is the objective lens with axial dispersion.The nonlinear dispersion of axial dispersion and wavelength of the dispersion ob-jective lens reduces the overall performance of theprofiler.In this paper,by analyzing the principle of confocal method to detect surface topography and the conditions for producing linear axial dispersion,the design indexes and requirements of confocal optical system are given,and a super-dispersive objective lens has been designed.The objective lens has four magnification structures in series dispersing the focus of wavelength between 400 and 700 nm to 30 mm longitudinal range.Through linear regression fitting of the defocusing amount and linearity of the wavelength,it is obtained that the coefficient of determination is 1,greatly improving the linearity of dispersion.关键词
光谱共焦/色散物镜/表面测量/线性色散/光学设计Key words
chromatic confocal/dispersive objective lens/surface profile/linear dispersion/optical design分类
信息技术与安全科学引用本文复制引用
杨锐,云宇,解滨,王安苏,刘子维,刘晨星..光谱共焦三维形貌仪用超大色散线性物镜组设计[J].强激光与粒子束,2018,30(5):9-13,5.
