强激光与粒子束2018，Vol.30Issue(5)：20-25,6.DOI:10.11884/HPLPB201830.170383
常压百级洁净度环境中SiO2薄膜稳定性
Stability of sol-gel silica coatings under ISO Class 5 atmosphere condition
李好 1白阳 1晏良宏 1严鸿维 1李合阳 1杨科 1刘太祥 1王韬 1袁晓东1
作者信息
- 1. 中国工程物理研究院 激光聚变研究中心,四川 绵阳621900
- 折叠
摘要
Abstract
Sol-gel SiO2 anti-reflective coatings were prepared with three different sol-gels,and their optic performance un-der atmosphere condition was studied in detail.Three AR coatings maintained reflective indexes of 1.15,1.19,1.25 respectively. The porous silica coatings can increase transmittance observably,but are very sensitive to contaminants and humidity in surround-ings due to their strong adsorptive capacity resulting from the hydroxyl on the coatings surface and their porous structure with large specific surface area.The pores of silica coating can be filled with contaminants and humidity adsorbed on the coatings, which will increase the refractive index of the coatings and also absorb or scatter the light and therefore reduce the transmittance and increase the reflectance simultaneously.The fused silica coated with AR coatings were placed in ISO Class 5 cleanroom (ISO 14644-1)for 180 days.The results show that the optic performance change of all coatings is significant after 80 days.The AR coating with a refractive index of 1.1 9 is more stable comparatively.关键词
SiO2薄膜/常压/百级环境/透射率/反射率/折射率Key words
SiO2coating/atmosphere/ISO Class 5 cleanroom/transmittance/reflectance/refractive index引用本文复制引用
李好,白阳,晏良宏,严鸿维,李合阳,杨科,刘太祥,王韬,袁晓东..常压百级洁净度环境中SiO2薄膜稳定性[J].强激光与粒子束,2018,30(5):20-25,6.
