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硅在脉冲激光作用下温度积累效应的数值模拟

孙鹏 李沫 杨庆鑫 汤戈 张健

太赫兹科学与电子信息学报2018,Vol.16Issue(1):158-163,6.
太赫兹科学与电子信息学报2018,Vol.16Issue(1):158-163,6.DOI:10.11805/TKYDA201801.0158

硅在脉冲激光作用下温度积累效应的数值模拟

Numerical simulation of the accumulative photo-thermal effect in silicon under illumination with sequential laser pulses

孙鹏 1李沫 2杨庆鑫 1汤戈 2张健3

作者信息

  • 1. 中国工程物理研究院 微系统与太赫兹研究中心,四川 成都 610200
  • 2. 中国工程物理研究院 电子工程研究所,四川 绵阳 621999
  • 3. 哈尔滨工业大学 物理系,黑龙江 哈尔滨 150000
  • 折叠

摘要

Abstract

The single-temperature model and Finite Element Method(FEM) are employed for the numerical simulation of the accumulative photo-thermal effect in silicon under illumination with sequential laser pulses. The time dependences of non-equilibrium carriers' density, free carrier absorption, and the lattice temperature under the interaction with one pulse, and multiple-pulse are studied, as well as the optical damage threshold. The results show that the accumulation of free carrier concentration is the main source of temperature accumulation. In the case of multiple-pulse, the shorter the pulse interval, and the narrower the pulse width, the more easily the material can be damaged.

关键词

激光脉冲/温度积累效应/晶格温度/重复频率/损伤阈值/脉宽

Key words

laser pulse/accumulative photo-thermal effect/lattice temperature/repetition rate/damage threshold/pulse width

分类

信息技术与安全科学

引用本文复制引用

孙鹏,李沫,杨庆鑫,汤戈,张健..硅在脉冲激光作用下温度积累效应的数值模拟[J].太赫兹科学与电子信息学报,2018,16(1):158-163,6.

基金项目

中国工程物理研究院院长基金资助项目(2014-1-100) (2014-1-100)

太赫兹科学与电子信息学报

OA北大核心CSTPCD

2095-4980

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