光学精密工程2018，Vol.26Issue(4)：743-748,6.DOI:10.3788/OPE.20182604.0743
大口径非球面系统的共基准加工与检验
Fabrication and testing of large aspheric system based on common reference
摘要
Abstract
A key technology for fabricating and testing three mirror astigmatism(TMA)was proposed based on a common reference,to overcome the difficulty of manufacturing and aligning large off-axis aspheric systems.The analysis and research of the basic principles involved were presented.When the Root Mean Square(RMS)of the surface error of the primary mirror and tertiary mirrors was better than λ/10(for wavelength λ at 632.8 nm),the primary and tertiary mirrors were measured and a-ligned with the common reference and the same supporting back plate,with the two mirrors were then being polished by Ion Beam Figuring(IBF).A large TMA system with primary and tertiary mirror apertures of 724 mm×247 mm and 632 mm×205 mm,respectively was fabricated and tested based on the proposed method.The integrated mirrors were polished by IBF,and the RMSs of the surface error of the primary and tertiary mirrors are 0.019λ and 0.017λ,respectively.关键词
光学加工/光学检测/非球面/三镜消像散系统/共基准/离子束加工Key words
optical fabrication/optical testing/aspheric surface/Three Mirror Astigmatism(TMA)/common reference/Ion Beam Figuring(IBF)分类
信息技术与安全科学引用本文复制引用
王孝坤,薛栋林,张学军..大口径非球面系统的共基准加工与检验[J].光学精密工程,2018,26(4):743-748,6.基金项目
国家自然科学基金资助项目(No.61036015) （No.61036015）
