光学精密工程2018，Vol.26Issue(4)：771-777,7.DOI:10.3788/OPE.20182604.0771
采用单位激励影响矩阵数值计算的瑞奇-康芒检测技术
Ritchey-Common interferometry using unit-excitation influence matrix's numerical calculation method
摘要
Abstract
Calculating the influence matrix between surface error and wavefront aberration is a key step in the Ritchey-Common test.A method that uses unit-excitation operation to calculate the influence matrix with high accuracy was studied in order to improve the precision of the test.It retrieves the system wavefront aberration when the flat mirror concludes only one kind of Zernike aberration,and obtains the influence coefficient vector through Zernike fitting.The influence matrix is formed from the coefficient vectors of all the Zernike aberrations.Least square fitting is then used to reconstruct the surface shape of the tested mirror.After reconstructing the wavefront with Ritchey angles of 26.5°and 40.5°,the test results show PV and RMS values of 0.1413λ and 0.0194λ respectively for the Φ90 mm flat mirror.Compared to the results from direct testing,the PV and RMS error in the Ritchey-Common method are 0.0828λ and 0.0109λ,respectively.This method can calculate the influ-ence matrix accurately,eliminate the dependence on the big F-number in traditional influence matrix methods and can reconstruct the surface shape with high precision.关键词
光学检测/单位激励法/数值计算/瑞奇-康芒法/Zernike拟合Key words
optical inspection/unit-excitation method/numerical calculation/Ritchey-Common meth-od/Zernike fitting分类
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刘一鸣,李金鹏,陈磊,林冬冬,郑锋华..采用单位激励影响矩阵数值计算的瑞奇-康芒检测技术[J].光学精密工程,2018,26(4):771-777,7.基金项目
江苏省自然科学基金资助项目(No.BK20160154) （No.BK20160154）
国家自然基金联合基金资助项目(No.U1731115) （No.U1731115）
