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新型运载火箭中电容式液位传感器接口专用集成电路

陈威 黄诚 秦尧 张国瑞 尹亮

光学精密工程2018,Vol.26Issue(4):875-883,9.
光学精密工程2018,Vol.26Issue(4):875-883,9.DOI:10.3788/OPE.20182604.0875

新型运载火箭中电容式液位传感器接口专用集成电路

A capacitive liquid level sensor interface application specitic integrated circuit for new carrier rocket

陈威 1黄诚 1秦尧 2张国瑞 2尹亮2

作者信息

  • 1. 上海航天设备制造总厂,上海200245
  • 2. 哈尔滨工业大学MEMS中心,黑龙江哈尔滨150001
  • 折叠

摘要

Abstract

In order to improve the capacitance detection performance of capacitive liquid level sensor in new aerospace carrier rocket,an interface(Application Specitic Integrated Circuit)ASIC of capacitive liquid level sensor in aerospace carrier rocket was designed.First,the system of the whole circuit was designed,w hich converted the output capacitance of capacitive liquid level sensor to voltage that had linear relationship with the output capacitance of the sensor.And then,the linearity,noise character-istics and temperature environment adaptability of interface ASIC were analyzed and studied.At last, the interface ASIC was fabricated in a standard 0.5 μm CMOS process and the performances of the chip were tested.The test results show that the linearity of capacitance detection of the ASIC is 0.005%,output noise is 3.7 aF/(when the capacitance which will be detected is 40 pF),the stability of capacitance detection is 7.4× 10-5pF(w hen the reference capacitance is 40 pF,the capacitance which will be detected is 40 pF,1 σ,1 h),the output zero position temperature coefficient is 4.5 μV/℃.The test results prove that the capacitance detection performance of the ASIC reaches the standard of capacitive liquid level sensormeasurement chip with the highest performance abroad, which can be widely used in many kinds of capacitive detection sensors.

关键词

电容式液位传感器/微弱电容检测/接口ASIC芯片/开关电容电路

Key words

capacitive liquid level sensor/weak-capacitance detection/interface Application Specitic In-tegrated Circuit(ASIC)/switched-capacitor circuits

分类

信息技术与安全科学

引用本文复制引用

陈威,黄诚,秦尧,张国瑞,尹亮..新型运载火箭中电容式液位传感器接口专用集成电路[J].光学精密工程,2018,26(4):875-883,9.

基金项目

上海航天科技创新基金资助项目(No.SAST2015052) (No.SAST2015052)

光学精密工程

OA北大核心CSCDCSTPCD

1004-924X

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