计量学报2018，Vol.39Issue(2)：246-250,5.DOI:10.3969/j.issn.1000-1158.2018.02.22
EL红外缺陷测试仪关键参量校准方法研究
Research on Calibration Method Key Parameters of EL Infrared Defect Tester
摘要
Abstract
Based on the spatial frequency response(SFR) test method,a calibration device for the critical parameters of the EL infrared defect tester was built.The effects of focusing and position placement on the resolution calibration are analyzed.For the portable and fixed EL tester,the corresponding test methods and operational procedures are given.A test method for portable EL tester is proposed,which can realize the calibration without reference background.Based on the above calibration device,the resolution parameters of various EL testers can be calibrated and the measurement results are reproducible.关键词
计量学/EL红外缺陷测试仪/空间频率响应/分辨率/校准Key words
metrology/EL infrared defect tester/SFR/resolution/calibration分类
通用工业技术引用本文复制引用
张可佳,王常世,张碧丰,熊利民,周桃庚,张俊超,孟海凤,蔡川,赫英威,李晓辉..EL红外缺陷测试仪关键参量校准方法研究[J].计量学报,2018,39(2):246-250,5.基金项目
国家863计划(2015AA050303) （2015AA050303）
国家国际科技合作专项(2015DFA60390) （2015DFA60390）
中国计量科学研究院自筹基本科研业务费(23-AKY1712) （23-AKY1712）
