现代电子技术2018，Vol.41Issue(8)：22-25,4.DOI:10.16652/j.issn.1004-373x.2018.08.006
多自由度运动误差在线测量系统设计
Design of multi-DOF motion error online measurement system
摘要
Abstract
In allusion to the problem that the traditional multi degree of freedom(multi-DOF)motion error measurement system is prone to the impact of work environment,and has poor error measurement stability,a multi-DOF motion error online measurement system based on laser interferometer is proposed and designed. Laser interferometer is introduced in the traditional motion error measurement system by analyzing the error measurement principle of laser interferometer. Accurate measurement of multi-DOF moving objects is performed by means of laser interference phenomenon. The multi-DOF motion error online measure-ment mathematical model is built to realize multi-DOF motion error measurement. The experimental results show that in compari-son with the traditional measurement system,the improved multi-DOF motion error online measurement system has better anti-in-terference ability and higher measurement accuracy.关键词
激光干涉仪/多自由度/运动误差/测量稳定性/在线测量/系统设计Key words
laser interferometer/multi-DOF/motion error/measurement stability/online measurement/system design分类
信息技术与安全科学引用本文复制引用
杨博..多自由度运动误差在线测量系统设计[J].现代电子技术,2018,41(8):22-25,4.基金项目
国家自然科学基金(21171179) Project Supported by National Natural Science Foundation of China(21171179) （21171179）
