传感技术学报2018，Vol.31Issue(4)：502-506,5.DOI:10.3969/j.issn.1004-1699.2018.04.002
基于喷墨打印的可实现敏感材料原位沉积和高温检测的柔性丙酮气体传感器
Fully Inkjet-Printed Acetone Gas Sensors on Flexible Substrates with Integrated Heater for Sensing Material in-situ Deposition and Elevated Temperature Detection
摘要
Abstract
In combination of inkjet-printed carbon masking and surface modification of ion-exchange method(SMIE) techniques,silver interdigitated electrode for sensor and the resistors for heating were fabricated on different sides of the polyimide substrate subsequently. The controlled temperature,ranging from 25 ℃ to 280 ℃,can be realized by adjusting the DC bias voltage across the resistive heater.The integrated heater offered twofold functions:ZnO sensing film in situ deposition and elevated temperature detection.With the aid of heater,the ZnO sensing films composed of nanoparticles were first in situ deposited.The heater introduction can obviously improve the sensor performance.The results indicated that the sensitivity increased monotonically with temperature(<150℃). Since the acetone desorp-tion on sensor surface had been facilitated,the sensor had the shortened response and recovery time,and the initial resistance drift is also tolerable. In addition,the heater can effectively reduce the interference from humidity during the acetone detection.关键词
丙酮传感器/柔性衬底/喷墨打印/原位沉积/ZnOKey words
acetone sensor/flexible substrate/inkjet printing/in situ deposition/ZnO分类
信息技术与安全科学引用本文复制引用
候湘瑜,张健..基于喷墨打印的可实现敏感材料原位沉积和高温检测的柔性丙酮气体传感器[J].传感技术学报,2018,31(4):502-506,5.基金项目
国家自然科学基金项目(61076070) （61076070）
