电子器件2018，Vol.41Issue(2)：279-285,7.DOI:10.3969/j.issn.1005-9490.2018.02.001
纳米ZnO/PDMS复合薄膜力敏特性研究
The Study on the Force-Sensitive Properties of Nano-ZnO/PDMS Composite Films
摘要
Abstract
The mechanical sensitive unit as a key part of mechanical detection technology,has been widely applied in the filed of aerospace,geological exploration,medical equipment and a lot of aspects of production and life. A polydimethylsiloxane(PDMS)-Zinc oxide copolymer was successfully prepared by ultrasonic mix method,which made it suitable more well for the demands of force sensitive sensor,using Zinc oxide powder as filler particles and polydimethylsiloxane(PDMS)as matrix. The preparation technics,microstructure,stress sensitive characteristics properties of ZnO/PDMS composite film were studied systematically. Then,the measuring technique for the stress sensitive characteristics of the composite film were designed step by step. On this basis,the stress sensitive charac-teristics of the composite film under different accelerometer was studied. The experimental results show that the accelerometer sensitivity can reach 0.484 pF/gnand verify that the feasibility of the composite film structure is applied in the accelerometer,establishes the theoretical basis and foundation for the validation of test force effect of accelerometer based on the structure of composite films.关键词
纳米ZnO/聚二甲基硅氧烷(PDMS)/SEM结构分析/力敏特性Key words
Nano-ZnO/polydimethylsiloxane(PDMS)/SEM/stress sensitive characteristics分类
通用工业技术引用本文复制引用
梁华,王自敏..纳米ZnO/PDMS复合薄膜力敏特性研究[J].电子器件,2018,41(2):279-285,7.基金项目
江西省教育厅教改课题项目(JXJG-16-25-8) （JXJG-16-25-8）
