摘要
Abstract
Because of the need of a high magnetic field change rate in the MEMS tunneling magnetoresistance micro machined gyroscope,the detection module is mainly used to change the frequency of the displacement sensitivity of the information and need to use the change of the magnetic field sensitive mass block displacement.Therefore,it is neces-sary to design a magnetic field with high magnetic field rate.Through the simulation analysis,the design and applica-tion of a MEMS gyro magnetic field have been set up in tunnel magnetoresistance,dimensions 500 μm×500 μm× 20 μm,materials for NdFeB,relative permeability 1.18,surface remanence 1.3T,magnetization direction perpendicular to the cross section. Under the design specifications,the permanent magnet with in-plane direction as the direction of magnetic field detection,maximum change rate can reach 0.2 Oe/nm,and the magnetic field to keep a certain degree of uniform in the other direction,not on the direction of magnetic field interference detection.关键词
磁场/隧道磁阻陀螺/永磁体Key words
magnetic field/tunnel magnetoresistance gyroscope/permanent magnet分类
机械制造
