摘要
Abstract
Because of its small size and high reliability,the resonator optical gyro is expected to be a new type of high precision angular velocity measuring instrument. Based on the analysis of the influence factors of the resonator angular velocity sensing,it is concluded that the gyro sensitivity is proportional to the product of the cavity quality factor Q and the cavity diameter D. The traditional wedge resonator is fabricated by MEMS process,which is simple and is the main structure of large size microcavity. However,due to the limitation of MEMS processing technology, the larger the diameter of D,the more difficult to ensure the uniformity and surface roughness of the micro cavity structure,the surface roughness of the micron level greatly reduces the Q value of the microcavity structure. There-fore,it is urgent to optimize the MEMS technology to improve the surface roughness of the large micro cavity struc-ture,and to improve the sensitivity of the optical microcavity gyro. Through the study of the preparation technology of the wedge cavity,the diameter of the wedge cavity is 8 mm,the surface roughness is 1 nm,the Q value is greater than 106,and the coupling efficiency is more than 95%.关键词
光学陀螺/楔形腔/品质因数/耦合结构/封装Key words
optical gyroscope/wedge cavity/quality factor/coupling structure/encapsulation分类
数理科学
