工程设计学报2018，Vol.25Issue(2)：123-130,8.DOI:10.3785/j.issn.1006-754X.2018.02.001
基于模糊控制的微操作平台位置精度补偿方法
Position precision compensation method of amicro-manipulation stage based on fuzzy control
摘要
Abstract
The hysteresis nonlinearity of piezoelectric micro-manipulation stage leads to the de-crease of its position accuracy and dynamic performance,and it is hard to establish the accurate hysteresis model.A position accuracy compensation method was adopted based on the fuzzy con-trol strategy to get rid of the dependence on hysteretic model.As for a one-dimensional micro-ma-nipulation stage,the position deviation and deviation variation rate of the stage was used as fuzzy input,and the input voltage change of piezoelectric actuator was used as fuzzy output.A method of developing fuzzy rules was presented based on experiment data of pID control to acquire expe-rience.The fuzzy relationship between the stage input and output by fuzzy reasoning and de-fuzzy process was established,and the adaptive compensation of hysteresis could be realized.In order to illustrate the feasibility of the proposed method,the experimental comparative analysis with pID control was carried out.The position errors were compared when the stage was tracking the sine signals with different frequencies.The experimental results show that the proposed fuzzy control method can make the stage have higher position tracking accuracy and faster tracking speed,and has better adaptability.关键词
微操作平台/模糊控制/位置精度补偿/迟滞非线性Key words
micro-manipulation stage/fuzzy control/position precision compensation/hysteresis nonlinearity分类
机械制造引用本文复制引用
胡俊峰,李永明,郑昌虎..基于模糊控制的微操作平台位置精度补偿方法[J].工程设计学报,2018,25(2):123-130,8.基金项目
国家自然科学基金资助项目(51565016,51265016) （51565016,51265016）
江西省自然科学基金资助项目(20171BAB206029) （20171BAB206029）
江西省教育厅科学技术研究项目(GJJ160612) （GJJ160612）
江西省杰出青年人才资助项目(20171BCB23063) （20171BCB23063）
