机械制造与自动化Issue(2)：8-10,14,4.DOI:10.19344/j.cnki.issn1671-5276.2018.02.003
拉伸模具内孔CVD金刚石薄膜抛光工艺研究
Study of Polishing Process of CVD Diamond Film in Inner Hole of Drawing Die
摘要
Abstract
Chemical vapor deposition(CVD) diamond can't be used directly,it have to be polished.On the basis of planar thick film polishing,this paper researches on the mechanical polishing process of CVD diamond film in the inner hole of the drawing die with the aid of polishing equipment,makes a comparison between the surface topographies before-polishing and after-polishing with the help of the surface roughness meter and the SEM and analyses the polishing process.It shows the process of the roughpolishing first and the half fine polishing second is good.关键词
CVD金刚石薄膜/机械抛光/表面形貌/拉伸模具Key words
CVD diamond film/mechanical polishing/surface morphology/drawing die分类
矿业与冶金引用本文复制引用
周思浩,相炳坤,王仕杰,苏文玉,孟兆升,王轶群..拉伸模具内孔CVD金刚石薄膜抛光工艺研究[J].机械制造与自动化,2018,(2):8-10,14,4.基金项目
国家自然科学基金(51275232 （）
51575269) （）
南京航空航天大学研究生创新基地(实验室)开放基金(ykfjj20150509) （实验室）
中央高校基本科研业务费专项资金资助 （）
