液晶与显示2018，Vol.33Issue(3)：208-212,5.DOI:10.3788/YJYXS20183303.0208
TFT-LCD制造工艺中金属或金属复合膜层坡度角的研究
TFT-LCD manufacture technology metal or metal composite film layer profile
范学丽 1靖瑞宽 1王晏酩 1靳腾 1董建杰 1许永昌 1徐斌 1章志兴 1高矿2
作者信息
- 1. 北京京东方光电科技有限公司,北京100176
- 2. 北京京东方显示技术有限公司,北京100176
- 折叠
摘要
Abstract
In the thin film transistor liquid crystal display(TFT-LCD)panel process,Gate(grid)layer and SD layer(source)circuit can use pure metal film layers according to the product requirements, such as molybdenum,copper and other metal film,can also use metal composite film layers such as a-luminum molybdenum,aluminum neodymium molybdenum,molybdenum aluminum molybdenum metal composite film.When different metal or metal composite layers are used as Gate and SD cir-cuits,different etchant should be applied.But in actual production,it is often an etchant which corre-sponds to the metal film layers or metal composite film layers.The molybdenum metal film layers etch rate is larger than the aluminum molybdenum composite film layers etch rate.When the alumi-num molybdenum composite film etching complete,the profile is abnormal sometimes,such as film larger angle(80~90°),top metal occurs tip or shrink phenomenon.When the macro defect occurs and the subsequent process will produce the corresponding optical defects or lead to residual material in the rear layer and affect the quality of products.In this paper,the factors affecting the profile of metal film layers or metal composite film layers are mainly affected by the etching process and exposure process.Through adjusting the etchant concentration,temperature,etching mode and exposure step to adjust the angle,the metal molybdenum occurrence probability of the metal film indentation is re-duced,the slope angle of the metal film is controlled at 60°,and the metal composite film slope angle is controlled at 50°so as to reduce the bad incidence and improve the product quality.关键词
坡度角/EtchRate/膜层/刻蚀Key words
profile/etch rate/film/etch分类
信息技术与安全科学引用本文复制引用
范学丽,靖瑞宽,王晏酩,靳腾,董建杰,许永昌,徐斌,章志兴,高矿..TFT-LCD制造工艺中金属或金属复合膜层坡度角的研究[J].液晶与显示,2018,33(3):208-212,5.
