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Polynomial Approach to Optimal One-wafer Cyclic Scheduling of Treelike Hybrid Multi-Cluster Tools via Petri Nets

Fajun Yang Naiqi Wu Yan Qiao Rong Su

自动化学报（英文版）2018，Vol.5Issue(1)：270-280,11.

自动化学报（英文版）2018，Vol.5Issue(1)：270-280,11.DOI:10.1109/JAS.2017.7510772

Polynomial Approach to Optimal One-wafer Cyclic Scheduling of Treelike Hybrid Multi-Cluster Tools via Petri Nets

Fajun Yang ¹Naiqi Wu ²Yan Qiao ³Rong Su⁴

作者信息

1. Department of Industrial Engineering, School of Electro-Mechanical Engineering, Guangdong University of Technology,Guangzhou 510006, China
2. School of Electrical and Electronic Engineering at Nanyang Technological University, 639798, Singapore
3. Institute of Systems Engineering,Macau University of Science and Technology, Taipa, Macau 999078, China
4. school of Electro-Mechanical Engineering,Guangdong University of Technology, Guangzhou 510006, China
折叠

摘要

关键词

Multi-cluster tool/Petri nets/scheduling/semiconductor manufacturing

Key words

Multi-cluster tool/Petri nets/scheduling/semiconductor manufacturing

引用本文复制引用

Fajun Yang,Naiqi Wu,Yan Qiao,Rong Su..Polynomial Approach to Optimal One-wafer Cyclic Scheduling of Treelike Hybrid Multi-Cluster Tools via Petri Nets[J].自动化学报（英文版）,2018,5(1):270-280,11.

基金项目

This work was supported in part by Science and Technology Development Fund (FDCT) of Macau (106/2016/A3),the National Natural Science Foundation of China (U1401240),and the Delta Electronics Inc and the National Research Foundation (NRF) Singapore under the Corp Lab@University Scheme. （FDCT）

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