红外与毫米波学报2018，Vol.37Issue(2)：140-143,153,5.DOI:10.11972/j.issn.1001-9014.2018.02.003
全息光刻制备LC-DFB及光栅刻蚀优化
Laterally-coupled distributed feedback lasers with optimized gratings by holographic lithography etching
摘要
Abstract
GaSb-based laterally coupled distributed feedback(LC-DFB)quantum well lasers with a wavelength of 2 μm were successfully prepared.Second order Bragg gratings are fabricated by holographic lithography and induc-tively coupled plasma etching(ICP).The etching conditions for grating preparation are optimized and a single lon-gitudinal mode lasing at room temperature is obtained.The room temperature peak power output per facet exceeds 5 mW with a maximum side-mode suppression ratio of more than 24 dB.关键词
镓锑基/侧向耦合分布反馈/LC-DFB/全息光刻/二阶布拉格光栅Key words
GaSb-based/laterally coupled distributed feedback/laterally coupled distributed feedback(LC-DFB)/holographic lithography/second order Bragg grating分类
数理科学引用本文复制引用
李欢,杨成奥,谢圣文,黄书山,柴小力,张宇,王金良,牛智川..全息光刻制备LC-DFB及光栅刻蚀优化[J].红外与毫米波学报,2018,37(2):140-143,153,5.基金项目
Supported by National Natural Science Foundation of China(61435012,61290303),the National 973 program(2014CB643903,2013CB932904) （61435012,61290303）
