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高功率单高阶模倒置表面浮雕结构垂直腔面发射激光器

王霞 郝永芹 晏长岭 王作斌 王志伟 谢检来 马晓辉 姜会林

红外与毫米波学报2018,Vol.37Issue(2):168-172,5.
红外与毫米波学报2018,Vol.37Issue(2):168-172,5.DOI:10.11972/j.issn.1001-9014.2018.02.007

高功率单高阶模倒置表面浮雕结构垂直腔面发射激光器

High power single-higher-mode VCSEL with inverted surface relief

王霞 1郝永芹 1晏长岭 1王作斌 2王志伟 1谢检来 1马晓辉 1姜会林3

作者信息

  • 1. 长春理工大学高功率半导体激光国家重点实验室,吉林长春 130022
  • 2. 长春理工大学科技部国家纳米操纵与制造国际联合研究中心,吉林长春 130022
  • 3. 长春理工大学空间光电技术研究所,吉林长春 130022
  • 折叠

摘要

Abstract

An inverted surface relief vertical-cavity surface-emitting laser(ISR-VCSEL)with annular light emitting window has been presented and investigated.The most prominent structural feature of the device is that the stable single-higher-order transverse mode emission is supported.The laser emits output power up to 9.8 mW at about six times threshold current with an SMSR close to 30 dB,and it can still keep the output power of 4 mW even at as high ambient temperature as 360 K.The measured far field power intensity shows a Gaussian-shaped beam profile with low divergence.

关键词

半导体激光器/垂直腔面发射激光器/单高阶模/高温/倒置表面浮雕

Key words

semiconductor laser/vertical-cavity surface-emitting laser(VCSEL)/single-higher-mode/high-tem-perature/inverted surface relief

分类

数理科学

引用本文复制引用

王霞,郝永芹,晏长岭,王作斌,王志伟,谢检来,马晓辉,姜会林..高功率单高阶模倒置表面浮雕结构垂直腔面发射激光器[J].红外与毫米波学报,2018,37(2):168-172,5.

基金项目

Supported by National Natural Science Foundation of China(11474038/61376045/11474036),the Equipment Pre-research Foundation of China(61424050302162405002),and the"111"Project of China(D17017) (11474038/61376045/11474036)

红外与毫米波学报

OA北大核心CSCDCSTPCDSCI

1001-9014

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