金刚石与磨料磨具工程2018，Vol.38Issue(2)：78-81,88,5.DOI:10.13394/j.cnki.jgszz.2018.2.0016
化学机械抛光304不锈钢用抛光液成分研究
Compositions of slurry used in chemical-mechanically polishing 304 stainless steel
摘要
Abstract
304 stainless steel will become one of the main materials of flexible display substrate due to its excellent characteristics.In order to improve the rate and quality of chemical mechanical polishing of 304 stainless steel,the influences of different oxidants on material removal rate and surface roughness under different mass concentration or volume concentration and pH value are mainly studied.The results show that the oxidants of Fe2O3,H2O2,and FeCl3 achieved the best polishing effects in pH=2, and that KMnO4achieved the best polishing effect in pH=10.The best surface roughness is 4 nm when the volume concentration of H2O2 is 10 mL/L,and the highest material removal rate is 209 nm/min when the mass concentration of FeCl3 is 4.0 g/L at their optimum pH.关键词
304不锈钢/化学机械抛光/氧化剂/材料去除率/表面粗糙度Key words
304 stainless steel/chemical mechanical polishing/oxidant/material removal rate/surface roughness分类
矿业与冶金引用本文复制引用
刘振辉,陈绍坤,彭亚男,李洁静,苏建修..化学机械抛光304不锈钢用抛光液成分研究[J].金刚石与磨料磨具工程,2018,38(2):78-81,88,5.基金项目
国家自然科学基金面上项目资助(No.51375149) （No.51375149）
河南科技学院"标志性创新工程"计划经费资助. （）
