计量学报2018,Vol.39Issue(3):368-372,5.DOI:10.3969/j.issn.1000-1158.2018.03.16
零差干涉仪用于振动校准中关键技术的研究
Study on Key Technologies of Vibration Calibration Using Homodyne Interferometer
摘要
Abstract
For the problem of huge data encountered when homodyne interferometer is used in low frequency vibration calibration,first the properties of the spectrum of the interference is described,and then a dynamic successive phase unwrap algorithm is used,this method requires information about acceleration in the process.Based on this method,the sampling rate can be heavily reduced with losing information and a small capacity of data.During the process of the amplitude and phase angle estimation,a recursive method of least squares is recommended,with this method not only the computation of matrix inverse can be avoided,but also value of the parameters can be calculated online.To sum up,the methods proposed can broaden the low frequency range for vibration calibration using homodyne interferometer.关键词
计量学/振动校准/零差干涉仪/相位展开/正弦拟合Key words
metrology/homodyne interferometer/vibration calibration/phase unwrapping/sine-approximation分类
通用工业技术引用本文复制引用
胡红波,杨丽峰,于梅..零差干涉仪用于振动校准中关键技术的研究[J].计量学报,2018,39(3):368-372,5.